Current density distributions in active integrated circuits result in patterns of magnetic fields that contain structural and functional information about the integrated circuit. Magnetic fields pass through standard materials used by the semiconductor industry and provide a powerful means to fingerprint integratedcircuit activity for security and failure analysis applications. Here, we demonstrate high spatial resolution, wide field-of-view, vector magnetic field imaging of static magnetic field emanations from an integrated circuit in different active states using a quantum diamond microscope.
Issued Patent: 11,519,989
Issue Date: December 6, 2022