Design for a Millimeter-Scale Walking Robot

A design is presented for a millimeter-scale walking robot. The five-millimeter-long robot would be fabricated using micro-lithographic techniques. The design specifies six identical legs, each of which is a discrete microelectromechanical system (MEMS), and for which detailed design drawings already have been developed. Each of the legs incorporates and integrates only motors and drive mechanisms that previously have been fabricated and demonstrated elsewhere, in other types of MEMS devices.